JPH01147272U - - Google Patents
Info
- Publication number
- JPH01147272U JPH01147272U JP4283188U JP4283188U JPH01147272U JP H01147272 U JPH01147272 U JP H01147272U JP 4283188 U JP4283188 U JP 4283188U JP 4283188 U JP4283188 U JP 4283188U JP H01147272 U JPH01147272 U JP H01147272U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- shutter
- growth chamber
- opening
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001451 molecular beam epitaxy Methods 0.000 claims 2
- 230000002452 interceptive effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283188U JPH057252Y2 (en]) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4283188U JPH057252Y2 (en]) | 1988-03-30 | 1988-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147272U true JPH01147272U (en]) | 1989-10-11 |
| JPH057252Y2 JPH057252Y2 (en]) | 1993-02-24 |
Family
ID=31269235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4283188U Expired - Lifetime JPH057252Y2 (en]) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057252Y2 (en]) |
-
1988
- 1988-03-30 JP JP4283188U patent/JPH057252Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057252Y2 (en]) | 1993-02-24 |
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